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Spectroscopic Ellipsometry: Principles and Applications
388 pages | Dec 12, 2007 |ISBN: 0470016086 | PDF | 8 Mb
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described.
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